6、高動態(tài)特性
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Basic Model |
VALII100 |
VALII200 |
VALII300 |
VALII400 |
VALII500 |
VALII600 |
VALII800 |
VALII1000 |
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|
Total Travel |
100 mm |
200 mm |
300 mm |
400 mm |
500 mm |
600 mm |
800 mm |
1000mm |
|
|
Motor Type |
Brushless Linear Sevomotor |
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Feedback |
Noncontact Linear Encoder or Laser Interferometer |
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Encoder |
Noncontact Linear Encoder |
0.001 μm - 0.1 μm |
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Laser Interferometer |
0.39 nm - 79 nm |
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Maximum Velocity (no-load) |
2 m/s |
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Peak Acceleration（no-load） |
20 m/s2 |
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Maximum Load Capacity |
50 kg |
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Accuracy |
Noncontact Linear Encoder(with error compensation,temperature stabilized within 0.2°C） |
±0.3 μm |
±0.4 μm |
±0.6 μm |
±1 μm |
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Repeatability |
±0.2 μm |
±0.3 μm |
±0.4 μm |
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Straightness & Flatness |
±0.25 μm |
±0.4 μm |
±0.75 μm |
±1.5 μm |
±2.0 μm |
±3.0 μm |
±4.0 μm |
±5.0 μm |
|
|
Pitch/Yaw |
1 arc sec |
2 arc sec |
3 arc sec |
4 arc sec |
5 arc sec |
6 arc sec |
8 arc sec |
10 arc sec |
|
|
Velocity ripple |
0.1% @ 500 mm/s |
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Minimum incremental motion |
10 nm |
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|
Nominal Stage Mass |
30 kg |
35 kg |
40 kg |
45 kg |
50 kg |
55 kg |
65 kg |
75 kg |
|
|
Moving Mass |
8.5 kg |
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Operating Pressure |
0.5 MPa ± 0.05 MPa |
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|
Air Consumption |
0.8 SCFM |
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Moving Mass |
8.5 kg |
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Material |
Aluminum |
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MTBF |
20,000 hrs |
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