VXT130-XY Series
具有高度集成化的XY直線電機(jī)納米平臺(tái)
具有納米級(jí)性能并且行程較長(zhǎng)
高分辨率（1nm），高重復(fù)定位精度（75nm）和高定位精度（250nm）
運(yùn)動(dòng)誤差小，穩(wěn)定精度高
具有抗蠕變特性
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Mechanical Specifications |
VXT130-060-XY-N |
VXT130-060-XY-P |
VXT130-110-XY-N |
VXT130-110-XY-P |
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Travel |
60 mm |
60 mm |
110 mm |
110 mm |
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Accuracy |
±2.5 μm |
±250 nm |
±4 μm |
±300 nm |
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Resolution |
1 nm |
1 nm |
1 nm |
1 nm |
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Repeatability (Bi-Directional) |
±100 μm |
±75 nm |
±100 nm |
±75 nm |
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Repeatability (Uni-Directional) |
±25 nm |
±25 nm |
±25 nm |
±25 nm |
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Straightness & Flatness |
±1 μm |
±1 μm |
±1.5 μm |
±1.5 μm |
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Pitch |
10 arc sec |
10 arc sec |
12 arc sec |
12 arc sec |
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Yaw |
5 arc sec |
5 arc sec |
6 arc sec |
6 arc sec |
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Orthogonality |
10 arc sec |
3 arc sec |
10 arc sec |
3arc sec |
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Maximum Speed |
350 mm/s |
350 mm/s |
350 mm/s |
350 mm/s |
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Maximum Acceleration (No Load) |
10 m/s2 |
10 m/s2 |
10 m/s2 |
10 m/s2 |
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In-Position Stability |
<1 nm |
<1 nm |
<1 nm |
<1 nm |
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Maximum Force (Continuous) |
22 N |
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Load Capacity |
Horizontal |
10 kg |
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Moving Mass |
Upper |
1.6 kg |
1.6 kg |
2.2 kg |
2.2 kg |
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Lower |
4.3 kg |
4.3 kg |
5.8 kg |
5.8 kg |
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Stage Mass |
5.6 kg |
5.6 kg |
7.8 kg |
7.8 kg |
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Material |
Aluminum Body/Black Hardcoat Finish |
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MTBF(Mean Time Between Failure) |
20,000 hours |
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Mechanical Specifications |
VXT130-160-XY-N |
VXT130-160-XY-P |
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Travel |
160 mm |
160 mm |
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Accuracy |
±5 μm |
±30s0 nm |
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Resolution |
1 nm |
1 nm |
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Repeatability (Bi-Directional) |
±100 nm |
±75 nm |
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Repeatability (Uni-Directional) |
±25 nm |
±25 nm |
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Straightness & Flatness |
±2 μm |
±2 μm |
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Pitch |
15 arc sec |
15 arc sec |
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Yaw |
8 arc sec |
8 arc sec |
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Orthogonality |
10 arc sec |
3 arc sec |
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Maximum Speed |
350 mm/s |
350 mm/s |
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Maximum Acceleration (No Load) |
10 m/s2 |
10 m/s2 |
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In-Position Stability |
<1 nm |
<1 nm |
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Maximum Force (Continuous) |
22 N |
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Load Capacity |
Horizontal |
10 kg |
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Moving Mass |
Upper |
2.5 kg |
2.5 kg |
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Lower |
7.0 kg |
7.0 kg |
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Stage Mass |
9.0 kg |
9.0 kg |
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Material |
Aluminum Body/Black Hardcoat Finish |
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MTBF(Mean Time Between Failure) |
20,000 Hours |
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